Abstract
Bu makale, 3B mikro-eklemeli üretim yöntemlerinden biri olan iki-foton polimerizasyon (2PP) kullanılarak üretilen bir elektrotermal mikro-aktüatör çalışmasını sunmaktadır. İki yönde hareket edebilen elektrotermal mikro-aktüatör, belirlenen kriterlere göre tasarlanmış ve fabrikasyonu gerçekleştirilmiştir. Fabrikasyon sürecinde 3 deney gerçekleştirildi. İlk 2 deneyin üretim sürecinde mikro-aktüatörde bozulmalar ve kırılmalar ortaya çıkmıştır. Bu sorunlar 3. deneyin üretim sürecinde meydana gelmemiştir. Gerçekleştirilen deneyler, destek yapılarının mikro-aktüatör üretimi üzerindeki etkisini göstermektedir. Mikro-aktüatörün farklı çalışma gerilim değerleri altında yer değiştirmesini gözlemlemek için bir karakterizasyon düzeneği oluşturulmuştur. Karakterizasyon işlemi için, prob istasyonuna bağlı mikro-aktüatör, elektrik padlerine bağlı kablolar bulunan bir devre kartına bağlanmıştır. Prob istasyonunda yer değiştirmeleri gözlemlemek için optik mikroskop ve dijital kamera ile bir kurulum kullanıldı. Karakterizasyon işlemleri sonucunda mikro-aktüatörün yer değiştirmesini tespit etmek için görüntü işleme algoritması geliştirilmiştir. Çalışma gerilimi, 1V'luk artışlarla 0V'dan mikro-aktüatörün yapısında kırılma ve bozulma izlenene kadar arttırıldı. Aktüatör 7V gerilime kadar kırılma ve bozulmaya dayanabilmiştir. 8V gerilimde mikro-aktüatörün kollarında kırılmalar olmuştur. Maksimum yer değiştirme 2.82 µm olarak ölçüldü. Sonuç olarak, aktüatör tasarımı çift yönlü olduğundan mikro-aktüatörün maksimum hareketi 5.64 µm olarak tespit edilmiştir.
Keywords
Eklemeli imalat elektrotermal çalıştırma fabrikasyon iki-foton polimerizasyon görüntü işleme
References
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Abstract
References
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Details
| Primary Language | Turkish |
|---|---|
| Subjects | Engineering |
| Journal Section | Makaleler |
| Authors | |
| Publication Date | March 5, 2021 |
| Submission Date | February 2, 2020 |
| Acceptance Date | January 1, 2021 |
| Published in Issue | Year 2021 Volume: 36 Issue: 2 |